JPS63185576U - - Google Patents

Info

Publication number
JPS63185576U
JPS63185576U JP7795887U JP7795887U JPS63185576U JP S63185576 U JPS63185576 U JP S63185576U JP 7795887 U JP7795887 U JP 7795887U JP 7795887 U JP7795887 U JP 7795887U JP S63185576 U JPS63185576 U JP S63185576U
Authority
JP
Japan
Prior art keywords
magazine
transport path
pair
belts
reversible motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7795887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH065651Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7795887U priority Critical patent/JPH065651Y2/ja
Publication of JPS63185576U publication Critical patent/JPS63185576U/ja
Application granted granted Critical
Publication of JPH065651Y2 publication Critical patent/JPH065651Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7795887U 1987-05-22 1987-05-22 マガジンバツフア Expired - Lifetime JPH065651Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7795887U JPH065651Y2 (ja) 1987-05-22 1987-05-22 マガジンバツフア

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7795887U JPH065651Y2 (ja) 1987-05-22 1987-05-22 マガジンバツフア

Publications (2)

Publication Number Publication Date
JPS63185576U true JPS63185576U (en]) 1988-11-29
JPH065651Y2 JPH065651Y2 (ja) 1994-02-09

Family

ID=30926458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7795887U Expired - Lifetime JPH065651Y2 (ja) 1987-05-22 1987-05-22 マガジンバツフア

Country Status (1)

Country Link
JP (1) JPH065651Y2 (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013071812A (ja) * 2011-09-28 2013-04-22 Toppan Forms Co Ltd シートストッカ
JP2013071813A (ja) * 2011-09-28 2013-04-22 Toppan Forms Co Ltd シートストッカ
KR101409687B1 (ko) * 2011-07-04 2014-06-19 실트로닉 아게 다수의 웨이퍼형 가공물을 완충 보관하기 위한 장치 및 방법

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101409687B1 (ko) * 2011-07-04 2014-06-19 실트로닉 아게 다수의 웨이퍼형 가공물을 완충 보관하기 위한 장치 및 방법
US9199791B2 (en) 2011-07-04 2015-12-01 Siltronic Ag Device and method for buffer-storing a multiplicity of wafer-type workpieces
JP2013071812A (ja) * 2011-09-28 2013-04-22 Toppan Forms Co Ltd シートストッカ
JP2013071813A (ja) * 2011-09-28 2013-04-22 Toppan Forms Co Ltd シートストッカ

Also Published As

Publication number Publication date
JPH065651Y2 (ja) 1994-02-09

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